Brand:Lam Research
Model:810-069751-114
Module Type:High-Precision Etching Module
Operating Voltage:220 V
Frequency Range:50 Hz
Process Precision:±0.05%
Chamber Volume:2 liters
Temperature Range:-20°C to 120°C
Pressure Range:10 mTorr to 10 Torr
Gas Flow Rate:0.1 to 1000 sccm
Certifications:CE, UL, RoHS
The Lam Research 810-069751-114 is a cutting-edge semiconductor process module designed for high-precision manufacturing in the semiconductor industry. This module is engineered to deliver exceptional performance and reliability, making it an indispensable component for advanced semiconductor fabrication processes.
This high-precision semiconductor process module is built with robust materials, including high-grade stainless steel and ceramic, ensuring durability and longevity. Its compact design allows for easy integration into existing semiconductor equipment setups, enhancing efficiency and productivity.
The module operates within a wide range of frequencies, providing flexibility for various process requirements. With a certified operating voltage of 220V AC, it ensures stable and reliable performance under different conditions. The module is also compatible with multiple semiconductor equipment, making it a versatile choice for diverse applications.
Certified with ISO 9001, CE, and UL standards, the Lam Research 810-069751-114 meets stringent quality and safety requirements. Its precise engineering ensures consistent and accurate results, making it ideal for demanding semiconductor manufacturing processes.
Designed for ease of use, this semiconductor process module comes with comprehensive documentation and support services, allowing for seamless installation and operation. Whether you’re upgrading existing equipment or setting up new facilities, the Lam Research 810-069751-114 is a reliable and efficient solution.
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